The electrostatic levitation system for active suspension control of test sample in horizontal and vertical axes--中国科学院上海硅酸盐研究所

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论文题目:

The electrostatic levitation system for active suspension control of test sample in horizontal and vertical axes

作者:

Xiang, Biao; Wang, Chaoyue

刊物名称:

SENSORS AND ACTUATORS A-PHYSICAL

发表年度:

2022

卷:

337

期:

页码: