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论文题目:
Compositional control and electrical performance of atomic layer deposited Al2O3/TiO2 nanolaminates
作者:
Xu, Yuan; Pan, Ying; Gao, Lingshan; Zhang, Faqiang; Ma, Mingsheng; Liang, Jie; Liu, Zhifu
刊物名称:
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
发表年度:
2025
卷:
201
期:
页码:
